Thermoelastic effect of silicon for strain sensing
Ahn, Yongchul, Guckel, HenryVolume:
11
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/11/5/302
Date:
September, 2001
File:
PDF, 495 KB
english, 2001