Study of Anneal Behaviors of N 2+ -Implanted p –Si by Means of a Lateral Photovoltaic Method
Niu, Hirohiko, Matsuda, Tetsuro, Takai, MunezoVolume:
17
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.17.1983
Date:
November, 1978
File:
PDF, 123 KB
english, 1978