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ELS Study of Amorphous Si(Substrate)-SiO 2 (Film Overlayer) System with Varying Primary Electron Energy
Ito, Toshimichi, Kataoka, Yoshihide, Iwami, Motohiro, Hiraki, AkioVolume:
20
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.20.L417
Date:
June, 1981
File:
PDF, 309 KB
1981