Properties of Hydrogenated Amorphous Si-N Prepared by...

Japanese Journal of Applied Physics 1985 / 11 Vol. 24; Iss. Part 1, No

Properties of Hydrogenated Amorphous Si-N Prepared by Various Methods

Morimoto, Akiharu, Tsujimura, Yoshinori, Kumeda, Minoru, Shimizu, Tatsuo
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Volume:
24
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.1394
Date:
November, 1985
File:
PDF, 3.60 MB
english, 1985
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