Magnetic Field Switching of Cylindrical Magnetron...

Japanese Journal of Applied Physics 1992 / 12 Vol. 31; Iss. Part 1, No

Magnetic Field Switching of Cylindrical Magnetron Sputtering Rates for Coating Glass Fibers and Rods

Yu, Zengqi, Li, Lumin, Shi, Binxing, Collins, George, Meyer, Jack, Harbison, Barry, Aggarwal, Ishwar
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Volume:
31
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.4048
Date:
December, 1992
File:
PDF, 480 KB
english, 1992
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