Application of Focused Ion Beam Techniques to the...

Japanese Journal of Applied Physics 1994 / 1 Vol. 33; Iss. Part 2, No

Application of Focused Ion Beam Techniques to the Fabrication of Lateral-Type Thin-Film Edge Field Emitters

Gotoh, Yasuhito, Inoue, Kazunori, Ohtake, Toshiya, Ueda, Hideaki, Hishida, Yasuyuki, Tsuji, Hiroshi, Ishikawa, Junzo
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Volume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L63
Date:
January, 1994
File:
PDF, 385 KB
english, 1994
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