Barrier Properties for Oxygen Diffusion in a TaSiN Layer

Japanese Journal of Applied Physics 1997 / 7 Vol. 36; Iss. Part 2, No

Barrier Properties for Oxygen Diffusion in a TaSiN Layer

Hara, Tohru, Tanaka, Masaru, Sakiyama, Keizo, Onishi, Shigeo, Ishihara, Kazuya, Kudo, Jun
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Volume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.L893
Date:
July, 1997
File:
PDF, 386 KB
english, 1997
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