Growth of “Oxide-Less” GaN Layer by Helicon-Wave Excited...

Growth of “Oxide-Less” GaN Layer by Helicon-Wave Excited N2-Ar Plasma Treatment of Al/GaAs Structure

Okamoto, Nariaki, Kasahara, Fumio, Ikoma, Hideaki
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Volume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.L424
Date:
April, 1999
File:
PDF, 226 KB
english, 1999
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