Development and Analysis of a High-Pressure Micro Jet Pad Conditioning System for Interlayer Dielectric Chemical Mechanical Planarization
Seike, Yoshiyuki, DeNardis, Darren, Sugiyama, Masano, Miyachi, Keiji, Doi, Toshiro, Philipossian, AraVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.1225
Date:
March, 2005
File:
PDF, 300 KB
english, 2005