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Effects of Photoresist Polymer Molecular Weight and Acid-Diffusion on Line-Edge Roughness
Patsis, G. P., Gogolides, E., Van Werden, K.Volume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.6341
Date:
August, 2005
File:
PDF, 203 KB
english, 2005