Mask Haze Measurement by Spectroscopic Ellipsometry

Japanese Journal of Applied Physics 2006 / 6 Vol. 45; Iss. 6B

Mask Haze Measurement by Spectroscopic Ellipsometry

Kim, Young-Hoon, Kim, Sung-Hyuck, Cho, Han-Koo, An, Ilsin, Oh, Hye-Keun
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.5388
Date:
June, 2006
File:
PDF, 289 KB
english, 2006
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