Development of Multilayer Resist Technology for Halftone Mask in Liquid Crystal Display Manufacturing
Horibe, Hideo, Ichikawa, Tomokazu, Takamatsu, ShinyaVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.7949
Date:
October, 2006
File:
PDF, 339 KB
english, 2006