Properties of Nanocrystalline Cubic Silicon Carbide Thin...

Japanese Journal of Applied Physics 2008 / 1 Vol. 47; Iss. 1

Properties of Nanocrystalline Cubic Silicon Carbide Thin Films Prepared by Hot-Wire Chemical Vapor Deposition Using SiH 4 /CH 4 /H 2 at Various Substrate Temperatures

Tabata, Akimori, Komura, Yusuke, Hoshide, Yoshiki, Narita, Tomoki, Kondo, Akihiro
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Volume:
47
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.561
Date:
January, 2008
File:
PDF, 1.13 MB
2008
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