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Characterization of Hot-Implanted Fe near the SiO 2 /Si Interface
Hoshino, Yasushi, Arima, Hiroki, Saito, Yasunao, Nakata, JyojiVolume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.035601
Date:
March, 2011
File:
PDF, 288 KB
english, 2011