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Structural Analysis of Si-Based Nanodot Arrays Self-Organized by Selective Etching of SiGe/Si Films
Takahashi, Masahiko, Nakamura, Yoshiaki, Kikkawa, Jun, Nakatsuka, Osamu, Zaima, Shigeaki, Sakai, AkiraVolume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.08LB11
Date:
August, 2011
File:
PDF, 286 KB
english, 2011