Computational Fluid Dynamics Modeling of Mono-Silane...

Japanese Journal of Applied Physics 2012 / 10 Vol. 51

Computational Fluid Dynamics Modeling of Mono-Silane Siemens Reactor

Jung, Hosub, Park, Jong Hoon, Kang, Seung Oh, Jeong, Jong Hyun, Jeon, Soyoung, Jung, Jae Hak, Kim, Woo Kyoung
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Volume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.10NA10
Date:
October, 2012
File:
PDF, 63 KB
english, 2012
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