Rapid and precise scanning helium ion microscope milling of solid-state nanopores for biomolecule detection
Yang, Jijin, Ferranti, David C, Stern, Lewis A, Sanford, Colin A, Huang, Jason, Ren, Zheng, Qin, Lu-Chang, Hall, Adam RVolume:
22
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/22/28/285310
Date:
July, 2011
File:
PDF, 786 KB
english, 2011