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Low-temperature glass bonding for sensor application using boron oxide thin films
Legtenberg, R, Bouwstra, S, Elwenspoek, MVolume:
1
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/1/3/005
Date:
September, 1991
File:
PDF, 487 KB
english, 1991