The fabrication of silicon-based PZT microstructures using...

Journal of Micromechanics and Microengineering 2008 / 05 Vol. 18; Iss. 5

The fabrication of silicon-based PZT microstructures using an aerosol deposition method

Wang, Xuan-Yu, Lee, Chi-Yuan, Hu, Yuh-Chung, Shih, Wen-Pin, Lee, Chih-Cheng, Huang, Jung-Tang, Chang, Pei-Zen
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Volume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/5/055034
Date:
May, 2008
File:
PDF, 942 KB
english, 2008
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