A nanomechanical system with piezoelectric actuation of a...

Journal of Micromechanics and Microengineering 2008 / 09 Vol. 18; Iss. 9

A nanomechanical system with piezoelectric actuation of a GaAs microbeam

Vopilkin, E A, Shashkin, V I, Drozdov, Y N, Daniltsev, V M, Gusev, S A, Shuleshova, I Yu
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Volume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/9/095006
Date:
September, 2008
File:
PDF, 414 KB
english, 2008
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