Surface acoustic wave probe for mechanical analysis of thin...

Surface acoustic wave probe for mechanical analysis of thin films and liquids

Drobe, H, Leidl, A
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Volume:
2
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/2/3/012
Date:
September, 1992
File:
PDF, 276 KB
english, 1992
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