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Double-Layer Epitaxial Growth of Si and B 13 P 2 on Si Substrates and Some Electrical Properties of Si Layers
Takenaka, Takao, Shohno, KatsufusaVolume:
13
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.13.1211
Date:
August, 1974
File:
PDF, 589 KB
1974