Preparation of PLZT Thin Films by RF Sputtering

Japanese Journal of Applied Physics 1976 / 6 Vol. 15; Iss. 6

Preparation of PLZT Thin Films by RF Sputtering

Matsunami, Hiroyuki, Suzuki, Minoru, Ishida, Makoto, Tanaka, Tetsuro
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Volume:
15
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.15.1163
Date:
June, 1976
File:
PDF, 801 KB
english, 1976
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