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Dose Rate Effect of the Preferential Sputtering of Copper-Nickel Alloys by Argon Ion at Elevated Temperatures
Shimizu, Hazime, Ono, Masatoshi, Koyama, Naoyuki, Ishida, YoichiVolume:
19
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.19.L567
Date:
October, 1980
File:
PDF, 464 KB
1980