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V 3 Si Thin-Film Synthesis by Magnetron Sputtering
Michikami, Osamu, Takenaka, HisatakaVolume:
21
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.21.L149
Date:
March, 1982
File:
PDF, 209 KB
english, 1982