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Evidence of the Existence of SiF 4 Molecules in Fluorinated Amorphous Silicon
Kumeda, Minoru, Yonezawa, Yasuto, Shimizu, TatsuoVolume:
23
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.23.L540
Date:
August, 1984
File:
PDF, 357 KB
1984