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Growth of Hydrogenated Amorphous Silicon Films by ArF Excimer Laser Photodissociation of Disilane
Yoshikawa, Akihiko, Yamaga, ShigekiVolume:
23
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.23.L91
Date:
February, 1984
File:
PDF, 464 KB
1984