Bombardment Damage in Reactively-Evaporated a-Si:H

Japanese Journal of Applied Physics 1985 / 8 Vol. 24; Iss. Part 1, No

Bombardment Damage in Reactively-Evaporated a-Si:H

Shindo, Masanari, Sato, Shigeru, Myokan, Isao, Mano, Shigeru, Shibata, Takuji
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Volume:
24
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.1100
Date:
August, 1985
File:
PDF, 219 KB
english, 1985
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