Induction Time for Nucleation in Amorphous Silicon Films...

Japanese Journal of Applied Physics 1988 / 8 Vol. 27; Iss. Part 2, No

Induction Time for Nucleation in Amorphous Silicon Films Prepared by Plasma CVD

Suzuki, Masakuni, Hiramoto, Masahiro, Oguiura, Mitsugu, Kamisaka, Wataru, Hasegawa, Seiichi
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Volume:
27
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.27.L1380
Date:
August, 1988
File:
PDF, 482 KB
english, 1988
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