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Growth of High-Mobility 3C-SiC Epilayers by Chemical Vapor Deposition
Shinohara, Mikiya, Yamanaka, Mitsugu, Daimon, Hiroshi, Sakuma, Eiichiro, Okumura, Hajime, Misawa, Shunji, Endo, Kazuhiro, Yoshida, SadafumiVolume:
27
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.27.L434
Date:
March, 1988
File:
PDF, 899 KB
english, 1988