Performance of a Focused-Ion-Beam Implanter with Tilt-Writing Function
Sawaragi, Hiroshi, Manabe, Hironobu, Kasahara, Haruo, Aihara, Ryuso, Nakamura, Kazuo, Nihei, Fumiyuki, Ochiai, Yukinori, Matsui, Shinji, Nozaki, TadatoshiVolume:
28
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.28.2095
Date:
October, 1989
File:
PDF, 775 KB
1989