Investigation on the Microstructure of Hydrogenated...

Investigation on the Microstructure of Hydrogenated Amorphous Carbon Films by Electron Energy-Loss Spectroscopy

Yamazaki, Hisashi, Katashima, Mitsuhiro, Bekku, Ichiro, Mihara, Masahiro, Okuyama, Naoki
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Volume:
29
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L2108
Date:
November, 1990
File:
PDF, 1.04 MB
english, 1990
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