Oxidation Site of Polycrystalline Silicon Surface Studied...

Japanese Journal of Applied Physics 1992 / 6 Vol. 31; Iss. Part 2, No

Oxidation Site of Polycrystalline Silicon Surface Studied Using Scanning Force/Tunneling Microscope (AFM/STM) in Air

Sugawara, Yasuhiro, Fukano, Yoshinobu, Nakano, Akihiko, Ida, Tohru, Morita, Seizo
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Volume:
31
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.L725
Date:
June, 1992
File:
PDF, 379 KB
english, 1992
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