Transmission Electron Microscopy Cross-Sectional...

Japanese Journal of Applied Physics 1992 / 6 Vol. 31; Iss. Part 2, No

Transmission Electron Microscopy Cross-Sectional Observation on Mechanically and Chemically Lapped Si (111) Surfaces

Wu, Xiao-Jing, Horiuchi, Shigeo, Shiwaku, Hideaki, Hyodo, Kazuyuki, Ando, Masami
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Volume:
31
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.L803
Date:
June, 1992
File:
PDF, 230 KB
english, 1992
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