X-Ray Photoelectron Spectroscopy of Fluorocarbon Films...

Japanese Journal of Applied Physics 1993 / 11 Vol. 32; Iss. Part 1, No

X-Ray Photoelectron Spectroscopy of Fluorocarbon Films Deposited by RF Sputtering

Yamada, Yoshinori, Kurobe, Toshiji
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.5090
Date:
November, 1993
File:
PDF, 783 KB
1993
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