Formation of High-Contrast Periodic Corrugations by...

Japanese Journal of Applied Physics 1995 / 2 Vol. 34; Iss. Part 1, No

Formation of High-Contrast Periodic Corrugations by Optimizing Optical Parameters of Photoresists in 325 nm Laser Holographic Exposure

Okamoto, Kazuya, Nakano, Yoshiaki, Tada, Kunio
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Volume:
34
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.1286
Date:
February, 1995
File:
PDF, 375 KB
english, 1995
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