Effect of Substrate Temperature on Electrical...

Japanese Journal of Applied Physics 1995 / 9 Vol. 34; Iss. Part 1, No

Effect of Substrate Temperature on Electrical Characteristics of ( P b , L a )( Z r , T i ) O 3 Ultrathin Films Deposited by Metalorganic Chemical Vapor Deposition

Hazumi, Shigeki, Asano, Takayuki, Hattori, Masaya, Nakashima, Hiroshi, Kobayashi, Ichizo, Okada, Masaru
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Volume:
34
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.5086
Date:
September, 1995
File:
PDF, 1.05 MB
1995
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