Suppression of Leakage Current in n-Channel Polysilicon...

Japanese Journal of Applied Physics 1995 / 2 Vol. 34; Iss. Part 1, No

Suppression of Leakage Current in n-Channel Polysilicon Thin-Film Transistors Using N H 3 Annealing

Choi, Deuk-Sung, Hur, Sung-Hoi, Yang, Gi-Young, Han, Chul-Hi, Kim, Choong-Ki
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Volume:
34
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.882
Date:
February, 1995
File:
PDF, 308 KB
english, 1995
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