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Fabrication of One-Dimensional Silicon Nanowire Structures with a Self-Aligned Point Contact
Namatsu, Hideo, Nagase, Masao, Kurihara, Kenji, Horiguchi, Seiji, Makino, TakahiroVolume:
35
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.L1148
Date:
September, 1996
File:
PDF, 266 KB
english, 1996