Titanium Nitride Thin Films Epitaxially Grown by...

Japanese Journal of Applied Physics 1997 / 4 Vol. 36; Iss. Part 1, No

Titanium Nitride Thin Films Epitaxially Grown by N-Implantation

Kasukabe, Yoshitaka, Ito, Atsuyuki, Nagata, Shinji, Kishimoto, Mokuyoshi, Fujino, Yutaka, Yamaguchi, Sadae, Yamada, Yukio
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Volume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.2323
Date:
April, 1997
File:
PDF, 85 KB
english, 1997
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