Characteristics of the Species Ablated from Silicon Surface...

Japanese Journal of Applied Physics 1998 / 5 Vol. 37; Iss. Part 1, No

Characteristics of the Species Ablated from Silicon Surface by Pulsed CO 2 Laser Irradiation

Sakka, Tetsuo, Hotta, Kokichi, Kuroyanagi, Akira, Akiba, Satoshi, Mabuchi, Mahito, Ogata, Yukio H.
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Volume:
37
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.2666
Date:
May, 1998
File:
PDF, 665 KB
1998
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