Impact of Spherical Aberrations on Printing Characteristics...

Japanese Journal of Applied Physics 1999 / 4 Vol. 38; Iss. Part 1, No

Impact of Spherical Aberrations on Printing Characteristics of Irregularly Aligned Patterns of Alternating Phase Shift Mask

Nakao, Shuji, Nakae, Akihiro, Tsujita, Kouichirou, Wakamiya, Wataru
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Volume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.1919
Date:
April, 1999
File:
PDF, 1.12 MB
english, 1999
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