A Modified Capacitance–Voltage Method Used for...

Japanese Journal of Applied Physics 2001 / 3 Vol. 40; Iss. Part 1, No

A Modified Capacitance–Voltage Method Used for L eff Extraction and Process Monitoring in Advanced 0.15 µm Complementary Metal-Oxide-Semiconductor Technology and Beyond

Huang, Heng-Sheng, Shiu, Jen-Shiuan, Lin, Shyh-Jye, Chou, Jih-Wen, Lee, Ryan, Chen, Coming, Hong, Gary
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Volume:
40
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.40.1222
Date:
March, 2001
File:
PDF, 501 KB
english, 2001
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