Transmission Electron Microscopy Observation and Simulation...

Japanese Journal of Applied Physics 2002 / 4 Vol. 41; Iss. Part 1, No

Transmission Electron Microscopy Observation and Simulation Analysis of Defect-Smoothing Effect of Molybdenum/Silicon Multilayer Coating for Extreme Ultraviolet Lithography Masks

Ogawa, Taro, Ito, Masaaki, Takahashi, Masashi, Hoko, Hiromasa, Yamanashi, Hiromasa, Hoshino, Eiichi, Okazaki, Shinji, Sekine, Keiichi, Kataoka, Izumi
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Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.2285
Date:
April, 2002
File:
PDF, 154 KB
english, 2002
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