Control of Two Types of Dielectric Relaxation Current for...

Japanese Journal of Applied Physics 2003 / 4 Vol. 42; Iss. Part 1, No

Control of Two Types of Dielectric Relaxation Current for Ta 2 O 5 Metal-Insulator-Metal Capacitors

Kiyotoshi, Masahiro, Hieda, Katsuhiko, Fukuzumi, Yoshiaki, Kohyama, Yusuke, Suzuki, Toshiya, Matsunaga, Daisuke, Hashimoto, Koichi
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.1943
Date:
April, 2003
File:
PDF, 110 KB
english, 2003
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