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Influence of a TiO 2 Adhesion Layer on the Structure and the Orientation of a Pt Layer in Pt/TiO 2 /SiO 2 /Si Structures
Abe, Norikazu, Otani, Yohei, Miyake, Masato, Kurita, Masaaki, Takeda, Hiroaki, Okamura, Soichiro, Shiosaki, TadashiVolume:
42
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.2791
Date:
May, 2003
File:
PDF, 329 KB
2003