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Roles of Ions and Free Electrons in the Synthesis of Mechanically Hard Amorphous-CN x Films Using a Dissociative Excitation Reaction of BrCN with the Ar Electron Cyclotron Resonance Plasma
Namiki, Kei-ichi C., Akasaka, Hiroki, Saitoh, Hidetoshi, Ito, HaruhikoVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.3682
Date:
June, 2003
File:
PDF, 314 KB
english, 2003