Ultrathin Oxynitride Films Formed by Using...

Japanese Journal of Applied Physics 2003 / 7 Vol. 42; Iss. Part 2, No

Ultrathin Oxynitride Films Formed by Using Pulse-Time-Modulated Nitrogen Beams

Samukawa, Seiji, Minemura, Youichi, Fukuda, Seiichi
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.L795
Date:
July, 2003
File:
PDF, 397 KB
english, 2003
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