Role of Boron Atoms on Fluorine Diffusion under Various...

Japanese Journal of Applied Physics 2005 / 5 Vol. 44; Iss. 5A

Role of Boron Atoms on Fluorine Diffusion under Various Stages of Annealing

Tachi, Masayuki, Tsuji, Hiroshi, Furuhashi, Masayuki, Taniguchi, Kenji
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Volume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.2902
Date:
May, 2005
File:
PDF, 481 KB
english, 2005
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