Nitridation in Photon-Assisted Process Using Argon Excimer...

Japanese Journal of Applied Physics 2006 / 5 Vol. 45; Iss. 5A

Nitridation in Photon-Assisted Process Using Argon Excimer Lamp

Toshikawa, Kiyohiko, Amari, Kouichi, Ishimura, Sou, Katto, Masahito, Yokotani, Atsushi, Kurosawa, Kou
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.4012
Date:
May, 2006
File:
PDF, 94 KB
english, 2006
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